ACM’s Ultra C VI Tool Supports Most Semiconductor Clean Processes for Advanced Logic, DRAM and 3D NAND Manufacturing; Provides 50% More Throughput Than 12 Chamber Tool FREMONT, Calif., April 21, 2022 ...
ACM Research's new SPM tool enhances wafer processing efficiency and cleanliness, gaining qualification from a key Chinese semiconductor manufacturer. ACM Research, Inc. announced that its ...